Semiconductor Manufacturing Industry Ultra-High Purity(UHP) gases bulk gas piping distribution systems

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Application/ServiceMeasurementGas StreamAnalyzer Options
Contamination of N2, H2, Ar carrier gases0 to 100 ppb O2N2, H2, Ar PI2-UHP100
Application/ServiceMeasurementGas StreamAnalyzer Options
Contamination of N2, H2, Ar carrier gases0 to 1 ppm O2N2, H2, Ar PI2-MS1000
Application/ServiceMeasurementGas StreamAnalyzer Options
Contamination of H2 scavenger gases used in atmosphere soldering and annealing copper films.0 to 100 ppb O2N2, H2, Ar PI2-UHP100
Application/ServiceMeasurementGas StreamAnalyzer Options
Contamination of H2 scavenger gases used in atmosphere soldering and annealing copper films.0 to 1 ppm O2N2, H2, Ar PI2-MS1000
Application/ServiceMeasurementGas StreamAnalyzer Options
Contamination of H2 scavenger gases used in atmosphere soldering and annealing copper films.0 to 10 ppm O2N2, H2, Ar GPR-1600
Application/ServiceMeasurementGas StreamAnalyzer Options
Non-invasive leak detection in UHP gas distribution systems with mobile cart0 to 100 ppb O2N2, H2, Ar PI2-UHP100
Application/ServiceMeasurementGas StreamAnalyzer Options
Non-invasive leak detection in UHP gas distribution systems with mobile cart0 to 1 ppm O2N2, H2, Ar PI2-MS1000
Application/ServiceMeasurementGas StreamAnalyzer Options
O2 deficiency in confined areas<19.5-20.0% O2Air, N2 GPR-35
Application/ServiceMeasurementGas StreamAnalyzer Options
ppm purity cryogenic, ceramic membrane, pressure swing adsorption (PSA) skid and deoxo-catalytic generated N2 (5 nines) for wafer oxidation furnaces0-10 ppm O2N2, H2 GPR-1600
Spot Checking
GPR-1200
Application/ServiceMeasurementGas StreamAnalyzer Options
Ultra High Purity N2 for heat treating silicon wafers0 to 100 ppb O2N2, H2, Ar PI2-UHP100
 
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CALL 909-392-6900
Analytical Industries Inc.
2855 Metropolitan Place,
Pomona, CA, 91767
USA
909-392-6900