Discover gas and liquid measurement solutions for semiconductor manufacturing. Ensure purity, protect yield, and optimize UHP processes with precision analyzers.
Visit us at SEMICON West, Booth #2076, October 7-9, 2025, to see our range of trace oxygen, moisture, and impurity analyzers, oxygen sensors, and liquid level switches designed for semiconductor applications.
Semiconductor manufacturing demands the strictest control over gas purity and process conditions. Even trace levels of oxygen, moisture, or impurities can impact wafer yield, tool performance, and overall production efficiency. Reliable gas measurement solutions are essential to safeguard process integrity, minimize contamination risks, and support consistent high-quality output.
Semiconductor processes rely on an array of specialty gases and chemicals, where even the smallest trace contaminant can cause defects, reduce yields, and increase operational costs.
Challenges include:
To overcome these challenges, semiconductor manufacturers require monitoring solutions that deliver ppt / ppb-level sensitivity, fast response, stability, and ease of integration into complex systems.
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PI2-MS Ultra Trace Oxygen Analyzer
Ensures reliable and cost-effective oxygen measurement down to low ppb levels. With rapid response, long-life replaceable sensors, and simple calibration, the PI2-MS supports applications including gas purity verification, tool monitoring, gloveboxes, and wafer processing. Flexible bench, wall, and portable configurations make it adaptable to facility needs. |
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GPR-1200 Portable Trace Oxygen Analyzer
Combines high accuracy (down to ~50 ppb) with portability, making it ideal for spot checks and pipeline verification in high-purity gases. Features include a four-way bypass/sample valve for fast response and extended sensor life, data logging, and hazardous area-certified configuration. |
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GPR-1500GB Trace Oxygen Analyzer
Designed specifically for critical environments like glove boxes and nitrogen generators, the GPR1500 / 2500 GB offers precise oxygen measurement from ambient air (~21% O₂) down to low ppm levels, ranging from 0–10 ppm up to 0–25% O₂. This makes it ideal for maintaining ultra-clean, controlled atmospheres in semiconductor and UHP gas applications. Variants with intrinsically safe certifications (IIC rating) enable safe deployment in hazardous environments and even hydrogen-rich gas systems. |
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XEC430 High-Accuracy Oxygen Analyzer – Coming Soon
The XEC430 provides precise oxygen measurement from low ppm levels up to 100% O₂, making it ideal for monitoring gas purity in semiconductor and other high-tech industrial processes. Built on Analytical Industries’ high-performance galvanic oxygen sensors, it combines accuracy with ease of use through a standardized chassis, HMI, and menu structure, ensuring operators only need to learn one interface across multiple applications. With flexible installation options including bench, 19″ rack, panel, and wall-mounted formats, the XEC430 delivers dependable performance and simplified operation wherever accurate oxygen monitoring is critical. |
Designed for OEM integration and process-critical measurement points, these sensors deliver ppm to percentage-level accuracy with rapid, stable performance. Variants include flanged, board-mounted, and threaded options, all ensuring process protection where even minimal oxygen intrusion can disrupt yields.
Provides fast and accurate trace moisture measurement down to –120 °C dew point (≈1 ppbV). Its compact, robust design with VCR connections ensures reliable integration into UHP gas lines. Analog/digital outputs and a service exchange program make maintenance straightforward, supporting process run times and stability.
A dual-GC system for ppt/ppb-level impurity analysis in UHP gases. Capable of monitoring noble gases, hydrocarbons, sulfur compounds, and ammonia, with optional integration oxygen and moisture modules for multi-parameter measurement. With flexible detector options, a large touchscreen interface, and remote management software, it combines high precision with operational efficiency.
Liquid level switches that use solid-state optical technology to provide accurate, maintenance-free detection of liquid presence across a wide range of applications. With compact designs for tight spaces, rugged industrial housings for harsh environments, and intrinsically safe models for hazardous areas, these switches deliver fast response times, immunity to foam and bubbles, and long-term durability. Available in multiple housing materials and mounting styles.
Our solutions are tailored to semiconductor manufacturing and related UHP gas industries, with applications including:
Semiconductor manufacturing requires uncompromising control of gas and liquid quality. Our portfolio of analyzers, transmitters, sensors, switches, and monitoring solutions ensures precision, reliability, and process integrity across the most demanding environments. By combining advanced technologies with ease of integration and maintenance, we help manufacturers achieve higher yields, improved efficiency, and reduced risk of contamination.
Contact us for more information on how our gas and liquid measurement solutions can optimize your semiconductor processes.
Contact our experienced engineers to discuss your application needs.